What Is a Piezoresistive Sensor?

Piezoresistance type transducer refers to a sensor made using the piezoresistive effect of single crystal silicon material and integrated circuit technology. After the single crystal silicon material is subjected to a force, the resistivity changes, and an electrical signal output proportional to the force change can be obtained through the measurement circuit. Piezoresistive sensors are used for the measurement and control of pressure, tension, pressure difference, and other physical quantities (such as liquid level, acceleration, weight, strain, flow, and vacuum) that can be transformed into force changes.

Piezoresistive sensor

Piezoresistance type transducer refers to the use of

This sensor uses an integrated process to integrate the resistance bar in

Piezoresistive sensors are based on semiconductor materials

CS Smith studied silicon in detail in 1954

Piezoresistive sensors are widely used in aerospace, aviation, marine, petrochemical, power machinery, biomedical engineering, meteorology, geology, seismic measurement and other fields. Pressure is a key parameter in the aerospace and aerospace industries. It requires high accuracy for the measurement of static and dynamic pressure, local pressure and the entire pressure field. Piezoresistive sensors are ideal sensors for this purpose. For example, it is used to measure the airflow pressure distribution of a helicopter wing, to test the dynamic distortion of the engine air intake, the pulsating pressure of the cascade, and the wing jitter. In the measurement of the center pressure of an aircraft jet engine, a specially designed silicon pressure sensor is used, and its operating temperature is above 500 ° C. A matching silicon pressure sensor with an accuracy of 0.05% is used in the atmospheric data measurement system of the Boeing airliner. In the reduced size wind tunnel model test, piezoresistive sensors can be densely installed at the wind tunnel inlet and in the engine intake duct model. The single sensor is only 2.36 mm in diameter and has a natural frequency of up to 300 kHz. Both nonlinearity and hysteresis are ± 0.22% of full scale. In biomedicine, piezoresistive sensors are also ideal detection tools. Injector pin piezoresistive pressure sensors with a thickness of 10 micrometers and a diameter of only 0.5 millimeters, and sensors that measure cardiovascular, intracranial, urethral, uterine, and intraocular pressure have been made. FIG. 3 is a structural diagram of a sensor for measuring brain pressure. Piezoresistive sensors are also effectively used in the measurement of explosion pressure and shock waves, vacuum measurement, monitoring and control of the performance of automotive engines, and measurement of weapons such as measuring the pressure in the gun barrel and transmitting shock waves. In addition, piezoresistive sensors are widely used in oil well pressure measurement, direction-while-drilling and location detection of underground sealed cable failure points, as well as flow and liquid level measurement. With the further development of microelectronic technology and computers, the application of piezoresistive sensors will also develop rapidly.