What Is a Microactuator?

Micro-actuators are the key technology of modern automatic control technology. In recent years, with the rapid development of microelectronic technology and micro-processing technology, especially the booming of micro-nano technology, it has provided strong technical support for the development of micro-actuators. This book is divided into 9 chapters, which systematically explain and introduce the basic principles and technical foundations of electromagnetic micromotors, optical actuators, microvalves, micropumps, biological microactuators, micromechanical actuators and chemical actuators in microactuators. , Manufacturing process and application examples.