What Is RF Magnetron Sputtering?

Magnetron sputtering is a type of Physical Vapor Deposition (PVD). The general sputtering method can be used to prepare multiple materials such as metals, semiconductors, insulators, and has the advantages of simple equipment, easy control, large coating area and strong adhesion. The magnetron sputtering method developed in the 1970s has achieved high speed, low temperature and low damage. Because high-speed sputtering is performed under low pressure, the ionization rate of the gas must be effectively increased. Magnetron sputtering introduces a magnetic field on the surface of the target cathode and uses the magnetic field to confine charged particles to increase the plasma density and increase the sputtering rate.

The working principle of magnetron sputtering is that the electrons

Magnetron sputtering includes many types. Each has different working principles and application objects. But there is one thing in common: the use of magnetic fields and

(1) Various functional films: such as films with absorption, transmission, reflection, refraction, and polarization functions. For example, a silicon nitride antireflection film is deposited at low temperature to improve the photoelectric conversion efficiency of a solar cell.

(2) Applications in the field of decoration, such as various total reflection films and translucent films, such as mobile phone cases, mice, etc.

(3) As a non-thermal coating technology in the field of microelectronics, it is mainly used in chemical vapor deposition (CVD) or metal organic

(4) Chemical vapor deposition (CVD) is difficult to grow and is not suitable for thin film deposition of materials, and a large area of very uniform thin films can be obtained.

(5) In the optical field: IF closed-field non-equilibrium magnetron sputtering technology has also been applied in optical thin films (such as antireflection coatings), low-emissivity glass, and transparent conductive glass. In particular, transparent conductive glass is currently widely used in flat panel display devices, solar cells, microwave and radio frequency shielding devices and devices, and sensors.

(6) In the mechanical processing industry, the surface deposition technology of surface functional films, super-hard films and self-lubricating films has been greatly developed since its introduction, which can effectively improve surface hardness, composite toughness, wear resistance and high temperature chemical stability Performance, thereby greatly improving the service life of coated products.

In addition to the above-mentioned fields that have been widely used, magnetron sputtering also plays an important role in the research of high-temperature superconducting films, ferroelectric films, giant magnetoresistive films, thin-film light-emitting materials, solar cells, and memory alloy films.