What Is a Plasma Etcher?

Plasma etching machine, also known as plasma etching machine, plasma plane etching machine, plasma etching machine, plasma surface treatment instrument, plasma cleaning system, etc. Plasma etching is the most common form of dry etching. The principle is that the gas exposed to the electron region forms a plasma. The resulting ionized gas and the gas that releases high-energy electrons form a plasma or ion When an ionized gas atom is accelerated by an electric field, it will release sufficient force and surface repelling force to tightly bond the material or etch the surface. To some extent, plasma cleaning is essentially a milder case of plasma etching. The equipment for performing the dry etching process includes a reaction chamber, a power source, and a vacuum section. The workpiece is fed into a reaction chamber evacuated by a vacuum pump. The gas is introduced and exchanged with the plasma. The plasma reacts on the surface of the workpiece, and the volatile byproducts of the reaction are pumped away by the vacuum pump. The plasma etching process is actually a reactive plasma process. Recent developments are the installation of shelves in the interior of the reaction chamber. This design is flexible, and users can remove the shelves to configure a suitable plasma etching method: reactive plasma (RIE), downstream plasma Downstream, direct plasma.

1. The silicon wafer runs horizontally and the machine wafer is high (plasma

Process of Plasma System Effect into Material

Thanks to plasma

High-density plasma etching is a key step in today's VLSI manufacturing process. Many endpoint detection technologies have been developed, and the endpoint detection equipment is designed for real-time monitoring of the etching process.

Plasma treatment can be applied to all substrates, and even complex geometries can be plasma activated, plasma cleaned, and plasma coated without any problems. The thermal and mechanical loads during plasma processing are very low, so low-pressure plasma can also process sensitive materials. Typical applications of plasma etching machines include:

Plasma removal of scum

Photoresist material peeling

Surface treatment

Anisotropic and isotropic failure analysis applications

Plasma etching reaction Material modification

Packaging cleaning

Passivation etch

Polyimide etch

Enhance adhesion

Biomedical applications

Polymerization

Mixture cleaning